Solar Energy Materials and Solar Cells · 2007 · 33 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEtching ProcessesSemiconductor SurfacesSilicon MaterialsSolar Cell MaterialsSolar CellsSurface ModificationCrystalline SiliconCrystalline Silicon Solar CellsDry EtchingSiliconSilicon Solar CellsSilicon Surface ScienceSurface EtchingWet Etching
2
Plasmaless dry etching of silicon with fluorine-containing compounds
D. E. Ibbotson, J. A. Mucha, Daniel Flamm et al. · Journal of Applied Physics · 1984 · 109 citations
Plasmaless etching of silicon using chlorine trifluoride
Yoji Saito, Osamu Yamaoka, Akira Yoshida · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 30 citations
Natural Sciences, Materials Engineering, Materials Science +16