D. E. Ibbotson

On the role of oxygen and hydrogen in diamond-forming discharges

J. A. Mucha, Daniel Flamm, D. E. Ibbotson · Journal of Applied Physics · 1989 · 244 citations

Engineering, Glow Discharge, Plasma Emission Actinometry +16

Diamond crystal growth by plasma chemical vapor deposition

C.-P. Chang, Daniel Flamm, D. E. Ibbotson et al. · Journal of Applied Physics · 1988 · 196 citations

Materials Science, Diamond-like Carbon, Chemical Engineering +12

Basic chemistry and mechanisms of plasma etching

Daniel Flamm, Vincent M. Donnelly, D. E. Ibbotson · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 165 citations

Materials Science, Materials Engineering, Electrical Engineering +13

Temperature Dependence of InP and GaAs Etching in a Chlorine Plasma

Vincent M. Donnelly, Daniel Flamm, Chengkun Tu et al. · Journal of The Electrochemical Society · 1982 · 121 citations

Optical Materials, Engineering, Chlorine Plasma +19

Silicon oxide deposition from tetraethoxysilane in a radio frequency downstream reactor: Mechanisms and step coverage

Nur Selamoglu, J. A. Mucha, D. E. Ibbotson et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 112 citations

Materials Science, Chemical Engineering, Low Teos Flow +10