J. A. Mucha

The reaction of fluorine atoms with silicon

Daniel Flamm, Vincent M. Donnelly, J. A. Mucha · Journal of Applied Physics · 1981 · 332 citations

Natural Sciences, Chemistry, Materials Science +17

Luminescence and structural study of porous silicon films

Ya Xie, William L. Wilson, Frances M. Ross et al. · Journal of Applied Physics · 1992 · 299 citations

Natural Sciences, Materials Engineering, Materials Science +17

On the role of oxygen and hydrogen in diamond-forming discharges

J. A. Mucha, Daniel Flamm, D. E. Ibbotson · Journal of Applied Physics · 1989 · 244 citations

Natural Sciences, Materials Engineering, Materials Science +7

Diamond crystal growth by plasma chemical vapor deposition

C.-P. Chang, Daniel Flamm, D. E. Ibbotson et al. · Journal of Applied Physics · 1988 · 197 citations

Natural Sciences, Materials Science, Physics +15

Silicon oxide deposition from tetraethoxysilane in a radio frequency downstream reactor: Mechanisms and step coverage

Nur Selamoglu, J. A. Mucha, D. E. Ibbotson et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 112 citations

Natural Sciences, Chemistry, Materials Science +13