Publication | Open Access
Structural analysis of Ti1−xSixNy nanocomposite films prepared by reactive magnetron sputtering
103
Citations
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References
1999
Year
Materials ScienceMaterials EngineeringEngineeringNanomaterialsNanotechnologyApplied PhysicsStructural AnalysisThin FilmsTi1−xsixny Nanocomposite FilmsNanocompositeThin Film ProcessingReactive Magnetron SputteringMaterial Preparation
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