Analytical static modelling and optimization of electrostatic micropumps

Abstract

Having developed a mechanical law with a simple elementary model of membrane deflection, we demonstrate the static instability of such a system under electrostatic actuation and provide an analytical solution for the membrane position. This allows us to highlight the sticking effect and the hysteresis phenomenon of the pump strike volume due to the nonlinearity of such excitation. We determine a parameter optimization procedure for the dimensions of the electrostatic actuated membrane in order to achieve maximum volume displacement.