Effect of geometric nonlinearity on dynamic pull-in behavior of coupled-domain microstructures based on classical and shear deformation plate theories

The resonant gate transistor

H.C. Nathanson, W.E. Newell, R.A. Wickstrom et al. · IEEE Transactions on Electron Devices · 1967 · 1.1K citations

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Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä et al. · Sensors and Actuators A Physical · 1995 · 463 citations

Engineering, Electrical Engineering, Physics +16

Review of modeling electrostatically actuated microelectromechanical systems

R.C. Batra, Maurizio Porfiri, Davide Spinello · Smart Materials and Structures · 2007 · 287 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A dynamic model, including contact bounce, of an electrostatically actuated microswitch

Ben McCarthy, George G. Adams, N.E. McGruer et al. · Journal of Microelectromechanical Systems · 2002 · 218 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Vibrations of narrow microbeams predeformed by an electric field

R.C. Batra, Maurizio Porfiri, Davide Spinello · Journal of Sound and Vibration · 2007 · 205 citations

Engineering, Electrical Engineering, Physics +12