Quantitative analysis of in situ wafer bowing measurements for III-nitride growth on sapphire - Concepedia

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Quantitative analysis of in situ wafer bowing measurements for III-nitride growth on sapphire

54

Citations

11

References

2008

Year

Frank Brunner, A. Knauer, Tony Schenk, M. Weyers, J.‐T. Zettler

Journal of Crystal Growth

Materials ScienceEngineeringQuantitative AnalysisApplied PhysicsAluminum Gallium NitrideIii-nitride GrowthCategoryiii-v SemiconductorOptoelectronicsMicrostructure

References

	Year	Citations

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