A silicon-based shear force sensor: development and characterization

Piezoresistive Properties of Silicon Diffused Layers

O. N. Tufte, E. L. Stelzer · Journal of Applied Physics · 1963 · 353 citations

Engineering, Materials Engineering, Materials Science +16

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation

Samaun, Kensall D. Wise, James B. Angell · IEEE Transactions on Biomedical Engineering · 1973 · 157 citations

Engineering, Bioengineering, Biomedical Engineering +17

Low temperature bonding for microfabrication of chemical analysis devices

H.Y Wang, Robert S. Foote, Stephen C. Jacobson et al. · Sensors and Actuators B Chemical · 1997 · 129 citations

Engineering, Chemical Engineering, Chemistry +14

A silicon force sensor for robotics and medicine

David J. Beebe, Arthur S. Hsieh, Denice D. Denton et al. · Sensors and Actuators A Physical · 1995 · 89 citations

Engineering, Bioengineering, Biomedical Engineering +12