MgO epitaxial thin films on (100) GaAs as a substrate for the growth of oriented PbTiO3

Abstract

Epitaxial MgO thin films were grown on (100) GaAs substrates by reactive rf magnetron sputtering. Coupled x-ray diffraction, off-axis φ scan, and transmission electron microscopy indicated in-plane alignment of the MgO film with the GaAs substrate such that MgO[100]∥GaAs[100]. PbTiO3 ferroelectric thin films, grown on this MgO surface, were found to be oriented with PbTiO3{100}∥ MgO(001)∥ GaAs(001) and PbTiO3〈100〉∥ MgO[100]∥ GaAs[100].