Concepedia

Synthesis of boron nitride film with low dielectric constant for its application to silicon ultralarge scale integrated semiconductors

Takashi Sugino, Tomoyoshi Tai, Yoshihiro Etou

Diamond and Related Materials · 2001 · 46 citations · 21 references

DOI

Concepts

References

21

Lattice Infrared Spectra of Boron Nitride and Boron Monophosphide

P. J. Gielisse, S. S. Mitra, J. N. Plendl et al. · Physical Review · 1967 · 406 citations

, , +11

Preparation and Properties of Thin Film Boron Nitride

Myron J. Rand, James F. Roberts · Journal of The Electrochemical Society · 1968 · 254 citations

, , +17

Observation of a negative electron affinity for boron nitride

Matthew Powers, Mark C. Benjamin, Lisa M. Porter et al. · Applied Physics Letters · 1995 · 175 citations

, , +15

Characterization of the nitridation process of boric acid

X. Gouin, P. Grange, Laurence Bois et al. · Journal of Alloys and Compounds · 1995 · 166 citations

, , +3

Characterization and Field Emission of Sulfur-Doped Boron Nitride Synthesized by Plasma-Assisted Chemical Vapor Deposition

Takashi Sugino, Kazuhiko Tanioka, Seiji Kawasaki et al. · Japanese Journal of Applied Physics · 1997 · 121 citations

, , +17