Resistivity, oxidation kinetics and diffusion barrier properties of thin film ZrB2

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

Natural Sciences, Materials Engineering, Materials Science +10

Refractory silicides for integrated circuits

S. P. Murarka · Journal of Vacuum Science and Technology · 1980 · 601 citations

Engineering, Electrical Engineering, Materials Science +17

Thermogravi metric Study of the Oxidation of ZrB[sub 2] in the Temperature Range of 800° to 1500°C

W. C. TRIPP, H. C. Graham · Journal of The Electrochemical Society · 1971 · 160 citations

Natural Sciences, Chemical Engineering, Chemistry +16

Synthesis and properties of some refractory transition metal diboride thin films

J. R. Shappirio, J. J. Finnegan · Thin Solid Films · 1983 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +11

Oxidation kinetics of ZrN thin films

L. Krusin‐Elbaum, M. Wittmer · Thin Solid Films · 1983 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +14