Oxidation kinetics of ZrN thin films

Metallurgical Thermochemistry.

A. V. Bradshaw · Chemical Engineering Science · 1968 · 548 citations

Oxidation kinetics of TiN thin films

M. Wittmer, J. R. Noser, H. Melchior · Journal of Applied Physics · 1981 · 286 citations

Natural Sciences, Materials Engineering, Materials Science +17

TiN formed by evaporation as a diffusion barrier between Al and Si

C. Y. Ting · Journal of Vacuum Science and Technology · 1982 · 168 citations

Natural Sciences, Materials Engineering, Materials Science +13

TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devices

M. Wittmer · Applied Physics Letters · 1980 · 137 citations

Engineering, Materials Engineering, Materials Science +17

Diffusion of Oxygen in Zirconium and Its Relation to Oxidation and Corrosion

J. P. Pemsler · Journal of The Electrochemical Society · 1958 · 137 citations

Natural Sciences, Materials Engineering, Materials Science +17