Synthesis and properties of some refractory transition metal diboride thin films

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

Natural Sciences, Materials Engineering, Materials Science +10

The formation of silicides from thin films of some rare-earth metals

J. E. E. Baglin, F. M. d’Heurle, C. S. Petersson · Applied Physics Letters · 1980 · 150 citations

Natural Sciences, Chemistry, Materials Science +12

Resistivities of Thin Film Transition Metal Silicides

S. P. Murarka, M. H. Read, C. J. Doherty et al. · Journal of The Electrochemical Society · 1982 · 120 citations

Natural Sciences, Materials Engineering, Materials Science +17

Heat-pulse annealing of arsenic-implanted silicon with a CW arc lamp

A. Gat · IEEE Electron Device Letters · 1981 · 82 citations

Engineering, Materials Engineering, Materials Science +17

Thick boride coatings by chemical vapor deposition

Hugh O. Pierson, A.W. Mullendore · Thin Solid Films · 1982 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +14