Concepedia

Incident ion energy spectrum and target sputtering rate in dc planar magnetron

D. Czekaj, B. Goranchev, E. K. Hollmann, V. A. Volpyas, A. G. Zaytsev

Vacuum · 1991 · 15 citations · 7 references

DOI

Concepts

References

7

Magnetron sputtering: basic physics and application to cylindrical magnetrons

John A. Thornton · Journal of Vacuum Science and Technology · 1978 · 361 citations

, , +10

An analytical formula and important parameters for low-energy ion sputtering

J. Bohdansky, J. Roth, H.L. Bay · Journal of Applied Physics · 1980 · 273 citations

, , +12

Theoretical studies on an empirical formula for sputtering yield at normal incidence

Y. Yamamura, N. Matsunami, Noriaki Itoh · Radiation Effects · 1983 · 156 citations

, , +7

Discharge characteristics for magnetron sputtering of Al in Ar and Ar/O2 mixtures

S. Maniv, W. D. Westwood · Journal of Vacuum Science and Technology · 1980 · 114 citations

, , +13

Evolution towards thermalization, and diffusion, of sputtered particle fluxes: Spatial profiles

J. A. Vallés-Abarca, A. Gras-Martí · Journal of Applied Physics · 1984 · 79 citations

, , +16