Concepedia

Publication | Closed Access

Incident ion energy spectrum and target sputtering rate in dc planar magnetron

DOI

15

Citations

7

References

1991

Year

D. Czekaj, B. Goranchev, E. K. Hollmann, V. A. Volpyas, A. G. Zaytsev
Vacuum

References

YearCitations

Page 1