Microstructing of silicon by electro-discharge machining (EDM) — part II: applications

Current Trends in Non-Conventional Material Removal Processes

Raymond Snoeys, Filip Staelens, W. Dekeyser · CIRP Annals · 1986 · 165 citations

Engineering, Materials Engineering, Materials Science +11

Micro electro-discharge machining and its applications

Takeshi Masaki, K Kawata, T. Masuzawa · 2002 · 128 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +12

Drilling of Deep Microholes by EDM

T. Masuzawa, J. Tsukamoto, Masahisa Fujino · CIRP Annals · 1989 · 121 citations

Engineering, Manufacturing Engineering, Drilling +4

Microstructuring of silicon by electro-discharge machining (EDM) — part I: theory

Dominiek Reynaerts, Paul-Henri 's Heeren, Hendrik Van Brussel · Sensors and Actuators A Physical · 1997 · 100 citations

Engineering, Manufacturing Engineering, Materials Science +12

Fabrication of 45° mirrors together with well-defined v-grooves using wet anisotropic etching of silicon

Carola Strandman, Lars Rosengren, H. Elderstig et al. · Journal of Microelectromechanical Systems · 1995 · 89 citations

Engineering, Manufacturing Engineering, Microfabrication +16