Concepedia

Effect of N2Ar mixing on the reactive sputtering characteristics of silicon

T. Serikawa, Akio Okamoto

Thin Solid Films · 1983 · 56 citations · 9 references

DOI

Concepts

References

9

Reactive sputtering of metals in oxidizing atmospheres

Johannes Heller · Thin Solid Films · 1973 · 148 citations

, , +8

The mechanism of reactive sputtering

E. Hollands, David Campbell · Journal of Materials Science · 1968 · 96 citations

, , +6

Dielectric Properties of Reactively Sputtered Films of Aluminum Nitride

A. J. Noreika, M. H. Francombe, S. A. Zeitman · Journal of Vacuum Science and Technology · 1969 · 85 citations

, , +17

Oxidation of an aluminum magnetron sputtering target in Ar/O2 mixtures

S. Maniv, W. D. Westwood · Journal of Applied Physics · 1980 · 60 citations

, , +17

Effect of Oxygen on the rf-Sputtering Rate of SiO2

Reese E. Jones, Harold F. Winters, L. I. Maissel · Journal of Vacuum Science and Technology · 1968 · 58 citations

, , +10