Sensors and Actuators A Physical · 2007 · 30 citations · 16 references
EngineeringChemical EngineeringMechanical EngineeringElectrochemical EngineeringMicroelectromechanical SystemsSensorsFuel CellsMems CharacterizationMems DesignMems FabricationMems MaterialsMems SensorsFuel Cell Sensor TechnologyMass SensorsMems Mechanical SensorsMems Sensor InterfacingMicroelectromechanical Sensor MaterialsMicrofabricated Capacitive SensorsMicroscale Sensing
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