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Intrinsic microcrystalline silicon (μc-Si:H) deposited by VHF-GD (very high frequency-glow discharge): a new material for photovoltaics and optoelectronics

A. Shah, E. Vallat‐Sauvain, P. Torres, J. Meier, U. Kroll, C. Hof, C. Droz, M. Goerlitzer, N. Wyrsch, M. Vaněček

Materials Science and Engineering B · 2000 · 62 citations · 35 references

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References

35

Substitutional doping of amorphous silicon

P. G. Le Comber · Solid State Communications · 1975 · 1.1K citations

, , +4

Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma

Akihisa Matsuda · Journal of Non-Crystalline Solids · 1983 · 646 citations

, , +7

Complete microcrystalline <i>p</i>-<i>i</i>-<i>n</i> solar cell—Crystalline or amorphous cell behavior?

J. Meier, R. Flückiger, H. Keppner et al. · Applied Physics Letters · 1994 · 594 citations · Full text

, , +19

Large grain polycrystalline silicon by low-temperature annealing of low-pressure chemical vapor deposited amorphous silicon films

Miltiadis K. Hatalis, David W. Greve · Journal of Applied Physics · 1988 · 318 citations

, , +18

The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport

S. Vepřek, V. Mareček · Solid-State Electronics · 1968 · 283 citations

, , +8