Surface-micromachined confocal scanning optical microscope

Abstract

Summary form only given.The confocal scanning microscope (CSM) can create high-resolution three-dimensional (3D) images of thick and light-scattering objects from successive acquisition of 2D images through its optical sectioning property. This capability allows us to develop a micro-optical-endoscope for high-quality in vivo imaging of living tissue. The microelectromechanical system (MEMS) approach has shown great promise to produce miniaturized CSMs by batch fabrication. We propose a novel surface micromachined 2D scanner to extend the performance of CSMs. This microscope is called surface-micromachined confocal scanning optical microscope (CSOM).