Solar Energy Materials and Solar Cells · 2004 · 18 citations · 21 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySemiconductor MaterialsThin FilmsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionThin-film MaterialsSiliconSilicon Crystal GrowthSilicon MicrostructuresSilicon Thin FilmsThin-film Growth Mechanisms
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Yves J. Chabal, G. S. Higashi, K. Raghavachari et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 664 citations