Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy - Concepedia

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Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy

42

Citations

37

References

2012

Year

M. Balaji, A. Claudel, V. Fellmann, Isabelle Gélard, E. Blanquet, Raphaël Boichot, Aurélie Pierret, Brigitte Attal‐Trétout, Alexandre Crisci, Stéphane Coindeau,

Journal of Alloys and Compounds

Materials ScienceMaterials EngineeringAln FilmsAln Nucleation LayersEngineeringAluminium NitrideEpitaxial GrowthSurface ScienceApplied PhysicsThin FilmsChemical DepositionMolecular Beam EpitaxyChemical Vapor DepositionMicrostructure

References

	Year	Citations

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