Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy

M. Balaji, A. Claudel, V. Fellmann, Isabelle Gélard, E. Blanquet, Raphaël Boichot, Aurélie Pierret, Brigitte Attal‐Trétout, Alexandre Crisci, Stéphane Coindeau,

Journal of Alloys and Compounds · 2012 · 42 citations · 37 references

Concepts

References

37