A numerical simulation model for molecular-beam epitaxial (MBE) growth on nonplanar surfaces

Molecular beam epitaxy of GaAs/AlGaAs superlattice heterostructures on nonplanar substrates

E. Kapon, M. C. Tamargo, D. M. Hwang · Applied Physics Letters · 1987 · 216 citations

Natural Sciences, Materials Science, Physics +17

Distributions of growth rates on patterned surfaces measured by scanning microprobe reflection high-energy electron diffraction

M. Hata, Toshiro Isu, A. Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 160 citations

Natural Sciences, Materials Engineering, Materials Science +17

Self-Organization of Steps in Growth of Strained Films on Vicinal Substrates

Feng Liu, J. Tersoff, M. G. Lagally · Physical Review Letters · 1998 · 129 citations

Natural Sciences, Materials Engineering, Materials Science +17

Extremely Flat Interfaces in GaAs/AlGaAs Quantum Wells Grown on GaAs (411)A Substrates by Molecular Beam Epitaxy

S. Shimomura, Akio Wakejima, Akira Adachi et al. · Japanese Journal of Applied Physics · 1993 · 97 citations

Engineering, Materials Engineering, Materials Science +17

Ga adatom incorporation kinetics at steps on vicinal GaAs (001) surfaces during growth of GaAs by molecular beam epitaxy

T. Shitara, J. Zhang, J.H. Neave et al. · Journal of Applied Physics · 1992 · 79 citations

Natural Sciences, Materials Science, Physics +17