Statistics
Publications
24
Citations
893
H-Index
17
Active since
1977
M. Hata is an author at The University of Osaka specializing in engineering, applied physics, and physics.
Publications per year
1977–2020
24
24
M. Hata, Toshiro Isu, A. Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 160 citations
M. Hata, Toshiro Isu, A. Watanabe et al. · Applied Physics Letters · 1990 · 75 citations
Materials Science, Semiconductors, Microscopic Distribution +15
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