Concepedia

Publication | Closed Access

Boron gettering on cavities induced by helium implantation in Si

DOI

13

Citations

9

References

2001

Year

Fabrice Roqueta, Daniel Alquier, L. Ventura, Ch. Dubois, R. Jérisian
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1