Fabrice Roqueta

Modeling of inductively coupled plasma SF6/O2/Ar plasma discharge: Effect of O2 on the plasma kinetic properties

Amand Pateau, A. Rhallabi, Marie-Claude Fernandez et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 49 citations

Engineering, Plasma Electronegativity, Glow Discharge +18

Stability of cavities formed by He+ implantation in silicon

Fabrice Roqueta, A. Grob, J.J. Grob et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 24 citations

Materials Engineering, Engineering, Physics +7

Evaluation of mesoporous silicon thermal conductivity by electrothermal finite element simulation

Laurent Siegert, Marie Capelle, Fabrice Roqueta et al. · Nanoscale Research Letters · 2012 · 21 citations · Full text

SF₆and C₄F₈global kinetic models coupled to sheath models

Yehya Haidar, Amand Pateau, A. Rhallabi et al. · Plasma Sources Science and Technology · 2014 · 20 citations

Engineering, Plasma Physics, Global Kinetic Models +17

Modelling and analysis of the stress distribution in a multi-thin film system Pt/USG/Si

Weizhen Yao, Fabrice Roqueta, Jean-Charles Craveur et al. · Materials Research Express · 2018 · 14 citations

Engineering, Severe Plastic Deformation, Residual Stress Analysis +16