Fabrice Roqueta - Concepedia

Author

Fabrice Roqueta

STMicroelectronics (France)ORCID

Also Known As

F Roqueta, F. Roqueta, Fabrice Roqueta

Publications

281

Citations

H-Index

Concepts

All Affiliations

STMicroelectronics (France)Institut des Matériaux Jean Rouxel Thales (France)Nantes Université Université de Tours

About

Fabrice Roqueta is an author at STMicroelectronics (France) specializing in engineering, applied physics, and electrical engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	9	9	164
2	Applied Physics	7	7	141
3	Electrical Engineering	5	5	100
4	Natural Sciences	1	1	49
5	Chemistry	1	1	49

Fabrice Roqueta

Publications

218

Citations

H-Index

Page 1

	Year	Citations
Modeling of inductively coupled plasma SF6/O2/Ar plasma discharge: Effect of O2 on the plasma kinetic properties Amand Pateau, A. Rhallabi, Marie-Claude Fernandez, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringPlasma ElectronegativityGlow DischargePlasma CombustionChemistry	2013	49
Stability of cavities formed by He+ implantation in silicon Fabrice Roqueta, A. Grob, J.J. Grob, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Materials EngineeringEngineeringPhysicsMicrofabricationApplied Physics	1999	24
Evaluation of mesoporous silicon thermal conductivity by electrothermal finite element simulation Laurent Siegert, Marie Capelle, Fabrice Roqueta, Nanoscale Research Letters	2012	21
SF<sub>6</sub>and C<sub>4</sub>F<sub>8</sub>global kinetic models coupled to sheath models Yehya Haidar, Amand Pateau, A. Rhallabi, Plasma Sources Science and Technology EngineeringPlasma PhysicsGlobal Kinetic ModelsComputational ChemistryPlasma Simulation	2014	20
Modelling and analysis of the stress distribution in a multi-thin film system Pt/USG/Si Weizhen Yao, Fabrice Roqueta, Jean-Charles Craveur, Materials Research Express EngineeringSevere Plastic DeformationResidual Stress AnalysisMechanical EngineeringResidual Stress	2018	14
Iron Gettering on Cavities Produced by Helium Implantation Fabrice Roqueta, A. Grob, Jean‐Jacques Grob, Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Materials ScienceEngineeringMetallurgical ProcessHelium ImplantationMicrostructure	1999	13
Boron gettering on cavities induced by helium implantation in Si Fabrice Roqueta, Daniel Alquier, L. Ventura, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Materials ScienceIon ImplantationBoron NitrideEngineeringPhysics	2001	13
Simulation of cryogenic silicon etching under SF6/O2/Ar plasma discharge Yehya Haidar, A. Rhallabi, Amand Pateau, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Electrical EngineeringIon ImplantationEngineeringMicrofabricationPlasma Simulation	2016	11
Multiscale approach for simulation of silicon etching using SF6/C4F8 Bosch process Guillaume Le Dain, A. Rhallabi, Marie Claude Fernandez, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films	2017	11
Modeling of C<sub>4</sub>F<sub>8</sub> inductively coupled plasmas: effects of high RF power on the plasma electrical properties Guillaume Le Dain, A. Rhallabi, Aurélie Girard, Plasma Sources Science and Technology	2019	11

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