Concepedia

Publication | Closed Access

Stability of cavities formed by He+ implantation in silicon

DOI

24

Citations

16

References

1999

Year

Fabrice Roqueta, A. Grob, J.J. Grob, R. Jérisian, J.P. Stoquert, L. Ventura
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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