Concepedia

Amand Pateau

AP

4

Publications

127

Citations

4

H-Index

2011

Active since

Affiliations

Institut des Matériaux Jean Rouxel(Current)

Nantes Université

STMicroelectronics (France)

Thales (France)

Lebanese University

Amand Pateau is an author at Institut des Matériaux Jean Rouxel specializing in applied physics, plasma simulation, and engineering.

Top concepts

Publications per year

2011–2016

4

Publications

4

Modeling of inductively coupled plasma SF6/O2/Ar plasma discharge: Effect of O2 on the plasma kinetic properties

Amand Pateau, A. Rhallabi, Marie-Claude Fernandez et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 49 citations

, , +18

Ripple edge engineering of graphene nanoribbons

Philipp Wagner, Chris Ewels, V. V. Ivanovskaya et al. · Physical Review B · 2011 · 47 citations · Full text

SF<sub>6</sub>and C<sub>4</sub>F<sub>8</sub>global kinetic models coupled to sheath models

Yehya Haidar, Amand Pateau, A. Rhallabi et al. · Plasma Sources Science and Technology · 2014 · 20 citations

, , +17

Simulation of cryogenic silicon etching under SF6/O2/Ar plasma discharge

Yehya Haidar, A. Rhallabi, Amand Pateau et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 11 citations

, , +12

Rows per page

1–4 of 4