In situ and ex situ diagnostics on melting and resolidification dynamics of amorphous and polycrystalline silicon thin films during excimer laser annealing

Mutsuko Hatano, Seung Jae Moon, Minghong Lee, Kenkichi Suzuki, Costas P. Grigoropoulos

Journal of Non-Crystalline Solids · 2000 · 29 citations · 10 references

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