Concepedia
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2001 · 26 citations · 3 references
Natural SciencesAstronomyOpticsPhotonicsX-ray OpticsPost-contamination Cleaning
3
Plasma-assisted chemical vapor deposition of dielectric thin films for ULSI semiconductor circuits
D. Cote, S. Nguyen, A. K. Stamper et al. · IBM Journal of Research and Development · 1999 · 100 citations
Natural Sciences, Materials Engineering, Materials Science +17
In situ reactive cleaning of X-ray optics by glow discharge
E. Johnson, R. Garrett · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1988 · 22 citations
Natural Sciences, Materials Science, Physics +9
Cleaning of carbon contaminated vacuum ultraviolet-optics: Influence on surface roughness and reflectivity
B. R. Müller, J. Feldhaus, F. Schäfers et al. · Review of Scientific Instruments · 1992 · 11 citations
Natural Sciences, Materials Science, Physics +15