Impact of interface variations on J–V and C–V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1−)Al O2 films - Concepedia

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Impact of interface variations on J–V and C–V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1−)Al O2 films

63

Citations

9

References

2009

Year

Wenke Weinreich, R. Reiche, M. Lemberger, Gunther Jegert, Johannes Müller, L. Wilde, S. Teichert, J. Heitmann, Elke Erben, L. Oberbeck,

Microelectronic Engineering

Materials ScienceC–v Polarity AsymmetryMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsInterface VariationsThin Film Process TechnologyThin FilmsMim CapacitorsThin Film Processing

References

	Year	Citations

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