Concepedia

Publication | Closed Access

Nano-line width control and standards using Lateral Pattern Definition technique

DOI

11

Citations

4

References

2006

Year

Michał Zaborowski, Dariusz Szmigiel, Teodor Gotszalk, Katerina Ivanova, Y. Sarov, Tzvetan Ivanov, B. Volland, Ivo W. Rangelow, P. Grabiec
Microelectronic Engineering

References

YearCitations

Page 1