Sputter deposition of NiTi thin film shape memory alloy using a heated target

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Natural Sciences, Materials Engineering, Materials Science +16

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William L. Benard, H. Kahn, A. H. Heuer et al. · Journal of Microelectromechanical Systems · 1998 · 375 citations

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Shape-memory properties in Ni-Ti sputter-deposited film

J. Busch, Aaron D. Johnson, C. H. Lee et al. · Journal of Applied Physics · 1990 · 214 citations

Natural Sciences, Materials Engineering, Materials Science +17

TiNi (shape memory) films silicon for MEMS applications

René Wolf, A. H. Heuer · Journal of Microelectromechanical Systems · 1995 · 186 citations

Engineering, Materials Engineering, Materials Science +17

Thin-film processing of TiNi shape memory alloy

James Alfred Walker, K.J. Gabriel, Mehran Mehregany · Sensors and Actuators A Physical · 1990 · 183 citations

Natural Sciences, Materials Engineering, Materials Science +14