Concepedia

Publication | Closed Access

Channeling contrast analysis of GaAs side-walls fabricated by laser wet chemical etching

DOI

19

Citations

4

References

1994

Year

M. Takai, S. Hara, C. Lee, A. Kinomura, T. Lohner
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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