Thin Solid Films · 1979 · 33 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsIii-v SemiconductorsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesOxidationPlasma OxidationPlasma-assisted OxidationPlasma-enhanced OxidationSemiconductor OxidationThin Oxide FilmsThin Oxide Layers
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Improved method of anodic oxidation of GaAs
Hajime Hasegawa, K.E. Forward, H. Hartnagel · Electronics Letters · 1975 · 59 citations