Electronics Letters · 1975 · 59 citations · 3 references
Natural SciencesChemistryMaterials ScienceElectrochemistryElectronic MaterialsSemiconductor MaterialsDielectricsElectrode MaterialsElectrode-electrolyte InterfacesElectrolyte MaterialsElectrolyte SolutionsThin Film OxidationAnodic OxidationAnodic Oxide FilmsAqueous Electrolyte MaterialsElectrochemical OxidationElectrolyte EffectsOxide ElectrolytesSemiconductor Oxidation
A new and better electrolyte for anodic oxidation of GaAs is described. It is an aqueous solution of tartaric or citric acid mixed with glycol and can produce, in an extremely stable manner, native oxide films with remarkably improved dielectric properties.
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