A novel surface-micromachined capacitive porous silicon humidity sensor

Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

Leigh Canham · Applied Physics Letters · 1990 · 8K citations

Engineering, Materials Engineering, Materials Science +17

Porous silicon formation mechanisms

R. L. Smith, Scott D. Collins · Journal of Applied Physics · 1992 · 1.2K citations

Natural Sciences, Chemistry, Materials Science +16

Ceramic sensors for humidity detection: the state-of-the-art and future developments

Enrico Traversa · Sensors and Actuators B Chemical · 1995 · 845 citations

Natural Sciences, Materials Engineering, Materials Science +16

Humidity sensors: Principles and applications

Noboru Yamazoe, Yasuhiro Shimizu · Sensors and Actuators · 1986 · 615 citations

Engineering, Materials Engineering, Materials Science +12

An experimental and theoretical study of the formation and microstructure of porous silicon

M.I.J. Beale, J. D. Benjamin, Michael J. Uren et al. · Journal of Crystal Growth · 1985 · 495 citations

Natural Sciences, Materials Engineering, Materials Science +13