Concepedia

Using an afterglow plasma to modify polystyrene surfaces in pulsed radio frequency (RF) argon discharges

Marshal Dhayal, D.A. Forder, Kristina L. Parry, Robert D. Short, James W. Bradley

Surface and Coatings Technology · 2003 · 21 citations · 12 references

DOI

Concepts

References

12

Analytical solution for capacitive RF sheath

M. A. Lieberman · IEEE Transactions on Plasma Science · 1988 · 548 citations

, , +14

Principles of Plasma Diagnostics

S. J. Zweben · Fusion Technology · 1990 · 374 citations

, , +16

Ion energy distributions in rf sheaths; review, analysis and simulation

Emi Kawamura, Vahid Vahedi, M. A. Lieberman et al. · Plasma Sources Science and Technology · 1999 · 371 citations

, , +17

Ion and electron dynamics in the sheath of radio-frequency glow discharges

C. Wild, P. Koidl · Journal of Applied Physics · 1991 · 225 citations

, , +15

Control of ion energy distribution at substrates during plasma processing

S.-B. Wang, A. Wendt · Journal of Applied Physics · 2000 · 169 citations · Full text

, , +8