Concepedia

S.-B. Wang

SW

2

Publications

235

Citations

2

H-Index

2000

Active since

Affiliations

University of Wisconsin–Madison(Current)

S.-B. Wang is an author at University of Wisconsin–Madison specializing in engineering, materials characterization, and electrical engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceNuclear MaterialsFunctional MaterialsMaterials EngineeringElectrical EngineeringMaterial Characterization

Publications per year

2000–2001

2

Publications

2

Control of ion energy distribution at substrates during plasma processing

S.-B. Wang, A. Wendt · Journal of Applied Physics · 2000 · 165 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +7

Ion bombardment energy and SiO2/Si fluorocarbon plasma etch selectivity

S.-B. Wang, A. Wendt · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 70 citations

Materials Science, Materials Engineering, Engineering +11

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