The Art of Modeling Coupled-Field Effects in Microdevices and Microsystems

Abstract

The rapid progress in microsystems technology is increasingly supported by MEMS-specific modeling methodologies and dedicated simulation tools. These do not only allow the visualization of fabrication processes and operational principles, but they also assist the designer in making decisions with a view to finding optimized microstructures under technological and economical constraints. Currently strong efforts are being made towards a predictive "CAD tool box " for top-down and closed-loop simulation of microsystems. We discuss the most important aspects to be focussed on and practicable methodologies for microdevice and system modeling, in particular the consistent treatment of coupled fields and coupled domains required for setting up physically-based models for full system and mixed-mode simulation, and for the reliable validation and calibration of the models.