Publication | Closed Access

Effect of O2/Ar gas flow ratio on the optical properties and mechanical stress of sputtered HfO2 thin films

Materials ScienceOptical MaterialsEngineeringMaterial AnalysisOptical PropertiesSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsChemical Vapor DepositionEpitaxial GrowthOptoelectronicsMechanical StressThin Film Processing