A simple model for the formation of compressive stress in thin films by ion bombardment

Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon

David R. McKenzie, David A. Muller, Bernard Pailthorpe · Physical Review Letters · 1991 · 955 citations

Natural Sciences, Materials Engineering, Materials Science +13

An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering

H. Windischmann · Journal of Applied Physics · 1987 · 401 citations

Natural Sciences, Materials Engineering, Materials Science +16

Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering

F. M. d’Heurle, J. M. E. Harper · Thin Solid Films · 1989 · 293 citations

Natural Sciences, Materials Engineering, Materials Science +12

Intrinsic stress in sputtered thin films

H. Windischmann · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 234 citations

Natural Sciences, Materials Science, Physics +14

Model for ion-assisted thin-film densification

Karl‐Heinz Müller · Journal of Applied Physics · 1986 · 193 citations

Natural Sciences, Materials Engineering, Materials Science +17