2003 · 10 citations · 4 references
EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSystem-on-chip DesignIntegrated Circuit DesignMems DesignMems FabricationMems SwitchesRadio-frequency Integrated CircuitsRf MemsBicmos TechnologyInsertion LossInsertion Loss ReductionMicroswitchesOhmic Rf Mems SwitchesRf Mems SwitchesSige Bicmos DesignSystem-on-chip Integration
A MEMS switch is driven by a 0.25/spl mu/m BiCMOS IC and achieves 0.4dB insertion loss and 54dB isolation at 2GHz. The 400/spl mu/m/spl times/50/spl mu/m MEMS device is built together on top of the wafers enabling a system-on-chip design.
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Micromachined low-loss microwave switches
Zhilin Yao, S. Chen, S. Eshelman et al. · Journal of Microelectromechanical Systems · 1999 · 390 citations