Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 12 citations · 5 references
EngineeringElectrical EngineeringMechanical EngineeringElectromagneticsElectromagnetismSensorsMagnetic SensorsMems SensorsMicroelectromechanical SensorsMicrofabrication ProcessesEddy Current AnalysisEddy Current InspectionEddy Current SensingEddy CurrentsMicrofabricated SensorsMicromachined SensorsMicroscale SensingNon-destructive Inspection
We have developed a multi-layer eddy current micro sensor. The dimension of the sensor is 3mm x 3mm x 80 pm. It was composed of one to four layers of micro spiral coil made of 10 x 10 pm2 copper lines. The number of turn in each layer is 40 turns. In the present work, we report on the fabrication and the evaluation of multi-layer eddy current micro sensors in both experiments and 3D FEM analysis.
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Kenichi Kawabe, H. Koyama, K. Shirae · IEEE Transactions on Magnetics · 1984 · 159 citations
Fabrication of high depth-to-width aspect ratio microstructures
G. Engelmann, O. Ehrmann, J. Simon et al. · 1992 · 55 citations
Natural Sciences, Materials Engineering, Materials Science +17