Concepedia

A Silicon Micromachined Floating-element Shear-stress Sensor With Optical Position Sensing By Photodiodes

A. Padmanabhan, H.D. Goldberg, Kenneth Breuer, Martin A. Schmidt

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 25 citations · 2 references

Concepts

EngineeringElectrical EngineeringMaterials EngineeringMicroelectromechanical SystemsMicrofabricationSensorsMechanical SensorsMems SensorsMicroelectromechanical SensorsMicromachiningOptical SensorsPhotodetectorsMicro-optical SensorsMicrofabricated SensorsMicromachined SensorsShear SensorsSilicon-based Optical Sensors

References

2

Design and calibration of a microfabricated floating-element shear-stress sensor

Martin A. Schmidt, Roger T. Howe, S.D. Senturia et al. · IEEE Transactions on Electron Devices · 1988 · 202 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +14

A microfabricated floating-element shear stress sensor using wafer-bonding technology

J. Shajii, K.-Y. Ng, Martin A. Schmidt · Journal of Microelectromechanical Systems · 1992 · 86 citations

Engineering, Materials Science, Mechanical Engineering +17