AIP conference proceedings · 2009 · 10 citations · 3 references
EngineeringChemical EngineeringManufacturing EngineeringElectrochemical EngineeringMicroelectromechanical SystemsMicrofabricationIndustrial ElectrochemistryMachiningMems SimulationMicrofabrication ProcessesMicromachiningSurface Micromachining3D Mathematical ModelingAccuracyElectrochemical MicromachiningMicroelectromechanical System FabricationMicroscale Fabrication
The need for complex and accurate three dimensional (3‐D) microcomponents is increasing rapidly for many industrial and consumer products. Electrochemical machining process (ECM) has the potential of generating desired crack‐free and stress‐free surfaces of microcomponents. This paper reports a study of pulse electrochemical micromachining (PECMM) using ultrashort (nanoseconds) pulses for generating complex 3‐D microstructures of high accuracy. A mathematical model of the microshaping process with taking into consideration unsteady phenomena in electrical double layer has been developed. The software for computer simulation of PECM has been developed and the effects of machining parameters on anodic localization and final shape of machined surface are presented.
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