2002 · 24 citations · 6 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationActuator DesignMachiningMems ActuatorsMems DesignMems FabricationMicromachiningContact GeometryElastic ContactMaximum OutputMaximum Power OutputMechanical PowerMicroactuatorsMicroelectromechanical ActuatorsPower Output
An extremely large output force surface acoustic wave (SAW) motor is reported. Driving frequency of the SAW device was 9.6 MHz. Sliders were fabricated with silicon surface machining. For the contact surface, the slider had a lot of projections to control elastic contact condition. Twenty five different projection designs were tested. Using a 4/spl times/4 mm/sup 2/ silicon surface micro fabricated slider, the maximum output force was 7.6 N. Namely, it was about 0.5 N/mm/sup 2/ or 50 N/cm/sup 2/. The no-loaded speed of the motor was 0.7 m/sec in the experiment. Estimated mechanical output power of the actuator was 1 W. The mechanical output force and output power are the best of all in MEMS actuators.
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Surface acoustic wave linear motor using silicon slider
N. Osakabe, Minoru Kurosawa, Toshiro Higuchi et al. · 2002 · 44 citations
Engineering, Mechanical Engineering, Mechatronics Engineering +12