Performance evaluation of photolithography cluster tools

Scheduling analysis of time-constrained dual-armed cluster tools

Ja-Hee Kim, Tae‐Eog Lee, Hwan-Yong Lee et al. · IEEE Transactions on Semiconductor Manufacturing · 2003 · 275 citations

Engineering, Industrial Engineering, Manufacturing Engineering +11

A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots

S. Venkatesh, Rob Davenport, P. Foxhoven et al. · IEEE Transactions on Semiconductor Manufacturing · 1997 · 256 citations

Engineering, Industrial Engineering, Manufacturing Engineering +13

Single-wafer cluster tool performance: an analysis of throughput

T.L. Perkinson, P.K. McLarty, R.S. Gyurcsik et al. · IEEE Transactions on Semiconductor Manufacturing · 1994 · 216 citations

Engineering, Industrial Engineering, Manufacturing Engineering +14

Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput

T.L. Perkinson, R.S. Gyurcsik, P.K. McLarty · IEEE Transactions on Semiconductor Manufacturing · 1996 · 159 citations

Engineering, Industrial Engineering, Manufacturing Engineering +11

Systems of multiple cluster tools: configuration, reliability, and performance

M.J. Lopez, Samuel Wood · IEEE Transactions on Semiconductor Manufacturing · 2003 · 95 citations

Computing, Industrial Engineering, Systems Engineering +13