Reliability assessment of polysilicon MEMS structures under mechanical fatigue loading

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Engineering, Materials Engineering, Materials Science +17

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Engineering, Electrical Engineering, Mechanical Engineering +17

Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens

H. Kahn, R. Ballarini, Robert L. Mullen et al. · Proceedings of the Royal Society A Mathematical Physical and Engineering Sciences · 1999 · 171 citations

Engineering, Materials Science, Mechanical Engineering +17

Subcritical crack growth in silicon MEMS

William W. Van Arsdell, Stuart B. Brown · Journal of Microelectromechanical Systems · 1999 · 143 citations

Engineering, Materials Engineering, Materials Science +17

Fracture testing of bulk silicon microcantilever beams subjected to a side load

Christopher J. Wilson, Patricia Beck · Journal of Microelectromechanical Systems · 1996 · 134 citations

Engineering, Materials Engineering, Mechanical Engineering +17