Investigating the influence of fabrication process and crystal orientation on shear strength of silicon microcomponents

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Engineering, Water Molecules, Silicon On Insulator +20

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 454 citations

Materials Science, Materials Engineering, Engineering +7

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

Timothy P. Weihs, Soon-Il Hong, J. C. Bravman et al. · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 376 citations

Materials Science, Engineering, Micromechanics +12

Fracture testing of silicon microelements <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> in a scanning electron microscope

Stefan Johansson, Jan‐Åke Schweitz, L Tenerz et al. · Journal of Applied Physics · 1988 · 225 citations

Engineering, Micromechanics, Microscopy +23

Slow Crack Growth in Single-Crystal Silicon

J. A. Connally, Stuart B. Brown · Science · 1992 · 183 citations

Engineering, Physics, Mechanical Behavior +15