Submicron Pattern Replication is a soft lithography technique that enables the faithful duplication of surface features with dimensions below one micrometer, distinguished by its reliance on elastomeric stamps or molds to transfer nanoscale geometries onto substrates with high resolution and precision.
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2017–2026
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29
Low-Pressure Nanoimprint Lithography
Dahl‐Young Khang, Hyewon Kang, Tae‐il Kim et al. · Nano Letters · 2004 · 121 citations
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Authors
124
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1–5 of 124
Institutions
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University of Nottingham
Nottingham, United Kingdom
2 h-index
6 publications
129 citations
HRL Laboratories (United States)
Malibu, United States
2 h-index
10 publications
380 citations
Korea Advanced Institute of Science and Technology
Daejeon, South Korea
2 h-index
2 publications
44 citations
University of Illinois Urbana-Champaign
Urbana, United States
2 h-index
10 publications
760 citations
Centre National de la Recherche Scientifique
Paris, France
2 h-index
15 publications
289 citations
Laboratoire d'Étude des Microstructures
Châtillon, France
1 h-index
7 publications
161 citations
Gesellschaft für Elektrometallurgie (Germany)
Nuremberg, Germany
1 h-index
3 publications
36 citations
Musashino Academia Musicae
Tokyo, Japan
1 h-index
4 publications
208 citations
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Venues
- Microelectronic Engineering
4 publications · 88 citations
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- Journal of Vacuum Science and Technology
3 publications · 489 citations
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- Advanced Materials
2 publications · 104 citations
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- Japanese Journal of Applied Physics
JJAP · 2 publications · 71 citations
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- Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
2 publications · 59 citations
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